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Channel Last Transistor Technology

A) Bulk MOSFET

  • High channel doping
  • Low mobility and performance
  • High variability and leakage

Epitaxial channel MOSFET

  • Advanced by Suvolta
  • Back diffusion in the epitaxial layer

Improved variability

  • No back diffusion
  • Very low channel doping
  • High mobility and performance
  • Low variability and leakage

SemiwiseFlat Field Transistor (FFT)

  • Better electrostatic integrity allows low channel doping
  • High mobility and performance
  • Low statistical variability and noise
  • Very low leakage

FFT advantages compared to Bulk MOSFET

Improved Performance

  • > 27% at high VD
  • > 65% at low  VD
  • > 35% at effective drive current

Improved variability

  • 60% reduction in statistical variability
  • Improved reliability
  • Order of magnitude noise reduction

Reduced Leakage

  • ~ 2 orders of magnitude
  • ~ lower band-to-band tunneling

Reduced Applicable to PD SOI and FinFET