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Channel Last Transistor Technology
A) Bulk MOSFET
High channel doping
Low mobility and performance
High variability and leakage
Epitaxial channel MOSFET
Advanced by Suvolta
Back diffusion in the epitaxial layer
Improved variability
No back diffusion
Very low channel doping
High mobility and performance
Low variability and leakage
SemiwiseFlat Field Transistor (FFT)
Better electrostatic integrity allows low channel doping
High mobility and performance
Low statistical variability and noise
Very low leakage
FFT advantages compared to Bulk MOSFET
Improved Performance
> 27% at high V
D
> 65% at low  V
D
> 35% at effective drive current
Improved variability
60% reduction in statistical variability
Improved reliability
Order of magnitude noise reduction
Reduced Leakage
~ 2 orders of magnitude
~ lower band-to-band tunneling
Reduced Applicable to PD SOI and FinFET